ArF Laser-Induced Fluence-Dependent Absorption of Calcium Fluoride Windows

Jue Wang; Gerald (Jerry) P. Cox; Istvan Balasa; Lars Jensen

doi:10.1364/FIO.2020.FTu2C.3

Frontiers in Optics / Laser Science
OSA Technical Digest (Optica Publishing Group, 2020),
paper FTu2C.3
•https://doi.org/10.1364/FIO.2020.FTu2C.3

ArF Laser-Induced Fluence-Dependent Absorption of Calcium Fluoride Windows

Jue Wang, Gerald (Jerry) P. Cox, Istvan Balasa, and Lars Jensen

Frontiers in Optics 2020

Washington, DC United States
14–17 September 2020
ISBN: 978-1-943580-80-4

From the session
Laser Processing and Light-matter Interaction (FTu2C)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
J. Wang, G. (J. ) P. Cox, I. Balasa, and L. Jensen, "ArF Laser-Induced Fluence-Dependent Absorption of Calcium Fluoride Windows," in Frontiers in Optics / Laser Science, B. Lee, C. Mazzali, K. Corwin, and R. Jason Jones, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper FTu2C.3.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get Video
Citation alert
Save article

Abstract

High throughput of microelectronic fabrication demands high performance CaF₂ laser optics. Based on ArF laser-induced fluence-dependent absorption, we derived one-photon/two-photon absorption, and surface/subsurface absorption of CaF₂ windows.

PDF Article | Presentation Video

More Like This

Gamma Radiation-Induced Absorptions In Calcium Fluoride

C. W. King and O. H. Nestor
WD2 Optics in Adverse Envirornments (OAE) 1987

Scatter Reduction of Calcium Fluoride Based DUV Optics

Jue Wang, Michael J Cangemi, Jean Francois Oudard, Marcus Trost, Tobias Herffurth, Sven Schröder, and Angela Duparré
WE.6 Optical Interference Coatings (OIC) 2016

Evaluation of Optically Finished CaF2 Windows from Far-Infrared to Vacuum-Ultraviolet

Jue Wang, Michael J. D'lallo, Steven VanKerkhove, and Horst Schreiber
MD7 Optical Interference Coatings (OIC) 2010

Previous Article Next Article

Presentation Video

Presentation video access is available to:

Optica Publishing Group subscribers
Technical meeting attendees
Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads