Scatter Reduction of Calcium Fluoride Based DUV Optics

Jue Wang; Michael J Cangemi; Jean Francois Oudard; Marcus Trost; Tobias Herffurth; Sven Schröder; Angela Duparré

doi:10.1364/OIC.2016.WE.6

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper WE.6
•https://doi.org/10.1364/OIC.2016.WE.6

Scatter Reduction of Calcium Fluoride Based DUV Optics

Jue Wang, Michael J Cangemi, Jean Francois Oudard, Marcus Trost, Tobias Herffurth, Sven Schröder, and Angela Duparré

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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J. Wang, M. J. Cangemi, J. F. Oudard, M. Trost, T. Herffurth, S. Schröder, and A. Duparré, "Scatter Reduction of Calcium Fluoride Based DUV Optics," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper WE.6.

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Abstract

Angle resolved scatter measurement was performed on uncoated and AR coated CaF₂. Subsurface-damage-free CaF₂ and AR coatings with smoothed capping led to 4-fold and 2-fold scatter reduction when compared to the corresponding super polished CaF₂.

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