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A Soft X-Ray Source Based on a Low Divergence, High Repetition Rate Ultraviolet Laser

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Abstract

The soft x-ray emission of dense plasmas produced by irradiation of solid targets with high intensity lasers has been studied extensively in recent years. Experiments motivated by requirements of the Inertial Confinement Fusion (ICF) program have dominated these studies, but in addition, other experiments have been directed toward the efficient production of soft x-rays for microlithographic and other industrial applications. These experiments have primarily been done using relatively large (E>1 J) lasers operated at low repetition rates.

© 1984 Optical Society of America

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