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Conferences > EUL > 1994 > EC > EC.52

Beryllium Based Multilayers for Normal Incidence EUV Reflectance

Ken Skulina, Craig Alford, Richard Bionta, Dan Makowiecki, E. M. Gullikson, Regina Soufli, J. B. Kortright, and J. H. Underwood

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Abstract

We report the experimental results of beryllium based multilayer mirrors for use in the 11.4 nm region. Mirrors using molybdenum as the high-Z material have demonstrated 68.7% peak reflectance at 11.3 nm.

© 1994 Optical Society of America

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