Abstract
The large area deposition of high-Tc superconductor films on semiconductor substrates is of central importance for hybrid microelectronic circuits. However, problems arise in deposition, because of strain induced by the lattice mismatch, and interdiffusion of the constituents between superconductor and semiconductor. Here, we examine the microwave properties of YBa2Cu3O7-δ on YSZ-buffered silicon. The critical thickness dc for YBCO on YSZ/Si is known to be about 50-70 nm. We determine the residual resistance and the absolute value of the magnetic penetration depth for films of different thickness below dc.
© 1994 IEEE
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