In this paper, we present a high-sensitive single-arm interferometry technology, called quadriwave lateral shearing interferometry, applied to surface shape and in-situ refractive index variation measurement. This full-field artefact-free technology enables single-shot measurement of the optical path difference (OPD) of samples over a large field of view along with an OPD resolution of 0.5nm.

© 2019 The Author(s)

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