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Conferences > OFT > 2023 > JTu4A > JTu4A.3
  • Optica Design and Fabrication Congress 2023 (IODC, OFT)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper JTu4A.3

Snapshot Roughness Measurement Method Using Polarization Lateral Shearing Interferometry

Hyo Mi Park, Luke D. Mayer, Daewook Kim, and Ki-Nam Joo

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Abstract

We propose a snapshot roughness measurement method based on the measurement result of a lateral shearing interferometer. In this method, various roughness parameters are calculated from a sheared interferogram without any sophisticated surface reconstruction algorithms.

© 2023 The Author(s)

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