This full-field three-dimensional (3D) optical microscope is based on the reflectivity-height transformation. Using a parallelogram prism and two CCDs to detect the reflectivity at the critical angle nearby can achieve the angle deviation and surface height.

© 2014 Optical Society of America

PDF Article
This paper was not presented at the conference


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription