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Conferences > DFM > 1995 > CDLC > CDLC743
  • Applications of Diamond Films and Related Materials: Third International Conference
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper CDLC743

Diamond-Like Hydrogenated Amorphous Carbon Prepared Using Saddle-Field Glow-Discharge Decomposition of Methane

F. Gaspari, W.C.W. Chan, P.K. Lim, and S. Zukotynski

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Abstract

Diamond-like hydrogenated carbon films were deposited using saddle-field glow-discharge in pure methane. XPS, XAES, Raman and x-ray spectroscopy suggest that the percentage of sp3/sp2 bonding was varied over a relatively wide range by adjusting pressure and substrate bias. It was found that a very high percentage of sp3 bonding could be achieved.

© 1995 Optical Society of America

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