Abstract

Diamond-like carbon (DLC) films have been deposited by plasma assisted chemical vapor deposition using a RF excited plasma of cyclohexane. The films have been deposited at different pressures and constant RF power density. For specific combinations of plasma parameters the precursor has been diluted with argon. It has been found that the physical properties and the wear resistance of the DLC films are strongly dependent on the pressure in the reactor and corresponding substrate bias. Films deposited at a pressure above a threshold value had polymer-like characteristics. It was further found that it is possible to enhance diamond-like properties of films deposited above the threshold pressure by diluting the precursor with argon. At sufficiently high dilution of the precursor, DLC films deposited above the threshold pressure had properties similar to those of films deposited below the threshold. The dilution with inert gas also enhanced the thermal stability of the DLC films and films stable at 400 °C have been obtained.

© 1995 Optical Society of America