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Conferences > CLEO_SI > 2022 > STh2F > STh2F.5

Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method

Shota Sota, Koichiro Handa, Takasumi Tanabe, Yoshinori Uzawa, Kentaro Furusawa, and Norihiko Sekine

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Abstract

We report frequency comb generation in a silicon nitride (SiN) based microring resonator fabricated by the hot-wire chemical vapor deposition (HW-CVD) method with an intrinsic quality factor in excess of 5×105.

© 2022 The Author(s)

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