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Conferences > ASSL > 2018 > ATu2A > ATu2A.11

Hot-wire CVD based SiN films for linear and nonlinear photonics device applications

Kentaro Furusawa, Yoshimi Yamashita, Kanna Aoki, Norihiko Sekine, Akifumi Kasamatsu, and Yoshi Uzawa

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Abstract

Optical properties of SiN photonic devices based on the hot-wire chemical vapor deposition (HWCVD) method are reported. Microring resonators exhibiting their quality factors in excess of 105 were successfully demonstrated in the telecommunication L band.

© 2018 The Author(s)

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