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Conferences > CLEO_SI > 2020 > STu3P > STu3P.5

Integrated ScAlN Photonic Circuits on Silicon Substrate

Shiyang Zhu, Qize Zhong, Nanxi Li, Ting Hu, Yuan Dong, Zhengji Xu, Yanyan Zhou, Yuan Hsing Fu, and Navab Singh

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Abstract

ScAlN has been applied in piezoelectric micro-electro-mechanical systems, while application in photonics remains unexplored. Here, ScAlN photonic circuits on silicon are presented, demonstrating waveguide propagation loss of 9±2 dB/cm and microring quality factor of 1.4×104.

© 2020 The Author(s)

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