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Conferences > CLEO_SI > 2018 > SW4B > SW4B.3

An unreleased MEMS actuated silicon nitride resonator with bidirectional tuning

Hao Tian, Bin Dong, Michael Zervas, Tobias J. Kippenberg, and Sunil A. Bhave

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Abstract

A silicon nitride photonic resonator is tuned by integrating a piezoelectric MEMS actuator above the resonator. Bidirectional tuning is achieved by controlling voltage polarity and judicious placement of the actuator above the ring.

© 2018 The Author(s)

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