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Conferences > CLEO_QELS > 2022 > FM4F > FM4F.5

Wafer-Scale Functional Metasurfaces on Free-Standing Membranes

Ming Lun Tseng, Aleksandrs Leitis, Aurelian John-Herpin, Yuri S Kivshar, and Hatice Altug

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Abstract

We demonstrate free-standing metasurfaces made by a new wafer-scale and CMOS compatible nanofabrication method and produce nanostructures over large-area transparent oxide membranes. Applications include narrow-band spectral filtering, efficient light focusing, polarization control and optofluidic biosensors.

© 2022 The Author(s)

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