Abstract
Fano resonances are characterized by an efficient ON/OFF amplitude transition in a more reduced wavelength detuning compared with the classical Lorentzian-type resonator of similar quality factors [1]. The sharp asymmetric lineshape with steep slope shown by a Fano resonance would have a considerable advantage for high sensitivity and low detection limit refractive index (RI) sensors [2]. Miniaturized RI sensors based on Si3N4 PhC and MRR can realize easy integration and scalability in CMOS fabs. Furthermore, MRR sensors have higher quality factor, relatively simple fabrication, and better stability. In this work, a PhC-MRR resonator structure to realize a Fano-like shape resonance is presented as shown in Fig. 1(a). The MRR is composed by two semi-circular sections with radius R, width WR and a coupling section Lc matching the number N of lattice periods a included on the PhC. Besides, the PhC is defined by the vertical size Wy, and the type of partial transmitting element (PTE) included: circular (C) or rectangle (S). The coupling distance gy controls the coupling coefficient between the two resonators.
© 2023 IEEE
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