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Conferences > CLEO_Europe > 2011 > CK9 > CK9_4
  • CLEO/Europe and EQEC 2011 Conference Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2011),
  • paper CK9_4

Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

Ting Han, Steve Madden, Douglas Bulla, Sukanta Debbarma, and Barry Luther-Davies

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Abstract

In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4µm wide and 1µm high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.

© 2011 Optical Society of America

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