Abstract

Chemical sensors utilising the change of the surface conductivity are based on the ability of thin semiconductive layers to absorb and, at higher temperatures, ionise oxygen on their surfaces The surface of metal oxides (SnO₂) and some organic substances (SnAcAc) exhibits the ability to enter into reversible chemical reaction with gases and vapours An KrF laser was used for the deposition (energy 700 mJ/pulse, repetition rate 5Hz, energy density (at 0,15 - 1,5 Jcm^-2) [1, 2] The resulting parameters (after heat-treated at 300 – 500°C) are summarised in Table 1 The multilayer dopant systems (0-10 wt %) were prepared from two targets (dopant concentration of 0 and 10 weight %). Each of these systems was tested also with 35 nm of surface Pd catalyst

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