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Conferences > CLEO_Europe > 2000 > CME > CME3
  • Conference on Lasers and Electro-Optics Europe
  • Technical Digest Series (Optica Publishing Group, 2000),
  • paper CME3

Fabrication of photonic crystal structure in fluorine-doped silicon dioxide film by dry and wet etching processes

Kenji Kintaka and Junji Nishii

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Abstract

Photonic crystals have been studied extensively because of their strong possibility in light control. Several techniques to form such structures have been reported so far. In this paper, we propose novel method for fabrication of two-dimensional (sub-three-dimensional) periodic structures. We demonstrate the fabrication of a prototype structure, i.e. two-dimensional array of mushroom structures.

© 2000 IEEE

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