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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CTuH6

Semiconductor microlenses fabricated by one-step wet etching

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Abstract

Microlenses and microiens arrays are critical in interfacing photonic devices such as VCSELs, photodiodes, and eventually in building compact photonic integrated circuits. Among others, refractive microlens formed directly onto semiconductor materials draw much attention because of the ability of high level integration with other semiconductor optoelectronic devices, as well as their large numerical aperture that enhances light capture angle. A number of techniques have been developed to fabricate semiconductor microlenses. One approach involves photoresist reflow followed by reactive-ion etching.1

© 2000 Optical Society of America

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