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Fabrication and optimisation of waveguides in lithium niobate by differential etching following spatially selective domain inversion

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Abstract

Lithium niobate is extensively used in a wide range of applications, due to its favourable electrooptic, acousto-optic, piezoelectric, elastic and photorefractive properties. The ability to engineer precisely controlled and very smooth structures has applications in lateral guidance such as waveguides and modulators, for multiple arrays in photonic bandgap structures and for surface acoustic wave devices such as filters and time delays.

© 1998 IEEE

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