Abstract
The surface cleaning effect is investigated here using Nd YAG and Excimer User irradiation The different kind of mechanisms encountered are studied as function of laser interaction parameters: energy density: 0.1J/cm2 - 10J/cm2, pulse duration : 10ns - 20ns, wave length radiation: 248nm - 532nm - 1064nm, laser repetition rate: 1Hz - 200Hz.
© 1998 IEEE
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