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Optical Waveguides in a-Si/SiO2 Submicrometer 3D Photonic Crystals: Fabrication and Observation

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Abstract

It is expected that optical circuits such as 90° bends [1] without radiation loss can be realized by using photonic crystals. In previous works [2, 3], however, it has been difficult to fabricate submicrometer three-dimensional (3D) structures larger than 4 periods. In this study, we have fabricated the 3D photonic crystal waveguides and observed propagation phenomena of the light beam for the first time.

© 1998 IEEE

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