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Optica Publishing Group
  • Integrated Photonics Research
  • OSA Technical Digest (Optica Publishing Group, 1998),
  • paper ITuA3

Fabrication Processes for 3D Periodic Nanostructures and Photonic Crystals

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Abstract

We review process technologies for 3D periodic nanostructures and photonic crystals. We then propose layer-by-layer deposition by bias sputtering, and demonstrate its usefulness. The mechanism of stationary pattern formation is elucidated.

© 1998 Optical Society of America

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