Abstract

Deposition of elements from organometallic compositions under the action of laser radiation has a great interest for maskless solid state technology in microelectronics and opto­electronics. Carbonyls of transitional metals such as Cr(CO)₆, Mo(CO)₆ and Fe(CO)₅ were used in the present work. Deposition of elements in conditions of the present experiment was thermochemical - deposition under the action of cw CO₂-laser radiation from Cr(CO)₆ vapors and photochemical - deposition under the action of KrF-laser radiation (λ_L = 2 48 nm) from Mo(CO)₆, Fe(CO)₅ vapors;deoosition under the action of Ar⁺-laser radiation (λ_L=488 nm) from Fe(CO)₅ vapors.

© 1996 IEEE