Abstract
Liquid encapsulated Laser Chemical Vapor Deposition (LLCVD) of metal and insulator patterns has previously been demonstrated for neat liquids1 and volatile molecular precursors in solution.2 In LLCVD, the focused laser beam locally heats the substrate immersed in a liquid containing the precursor. For triisobutyl Al1 metal carbonyls in dodecane and other similar systems, a microbubble of gas phase precursor is created around the heated site and deposition actually occurs from the vapor.
© 1996 Optical Society of America
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