Abstract

We demonstrate high-speed diffraction-limited 3D direct laser writing using pivoted galvo mirrors. High photoresist curing speeds and stitching of individual scan fields allow for the fabrication of diffractive and refractive micro-optical elements on large areas.

© 2013 Optical Society of America

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More Like This
Femtosecond laser direct writing of 3D high-aspect-ratio nanofluidic channels in glass: a new platform for DNA analysis

Y. Liao, C. Liu, F. He, L. Qiao, Y. Cheng, K. Sugioka, and K. Midorikawa
CM1H.1 CLEO: Science and Innovations (CLEO_SI) 2013

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Michael Moebius, Kevin Vora, SeungYeon Kang, Philip Munoz, Guoliang Deng, and Eric Mazur
SW1K.6 CLEO: Science and Innovations (CLEO_SI) 2015

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Liang (Leon) Yuan and Peter R. Herman
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