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Simultaneous Measurement of Refractive Index and Lens Surface Spacing in Optical Systems by Dual-Comb Ranging

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Abstract

We present a method to measure the refractive index and lens surface spacing in optical systems simultaneously by dual-comb ranging. The repeatability precision of thickness and refractive index is better than 0.18 μm and 1.6×10-4 .

© 2022 IEEE

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