Abstract
We fabricated a laterally varying porous silicon (pSi) Fabry-Perot tunable filter by employing the spatially graded pSi etch technique through a tapered etch mask pattern. Reflectance measurements revealed that the tuning range can be made as wide as -100 nm while the typical transmission bandwidth is ~3 nm in the 1550 nm wavelength range.
© 2007 IEEE
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