Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThG1_3

Spectral-domain interferometry for simultaneous measuring the refractive index and thickness

Not Accessible

Your library or personal account may give you access

Abstract

A new method for real-time and simultaneous measuring the refractive index and thickness of thin films is proposed. The method is based on spectral dependence of phase-shifting on reflection at one of film's surface. The measurement consists in localizing π- phase shift observed in a channel spectrum.

© 2007 IEEE

PDF Article
More Like This
Measuring the wafer thickness and refractive index by spectral interferometry of optical frequency comb

Shilin Xiong, Yuetang Yang, and Guanhao Wu
C10F_3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2020

Tunable Twyman-Green Interferometry for Motion-Free Simultaneous Thickness and Refractive Index Measurements

Arjent Imeri and Syed Azer Reza
AW4K.4 CLEO: Applications and Technology (CLEO:A&T) 2023

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved