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Conferences > CLEOPR > 2001 > TuE4 > TuE4_4
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuE4_4

Relationship between Sensitivity and Waveguide Position on Diaphragm for Silicon-Based Integrated Optic Pressure Sensor

Atsushi Yamada, Yuki Shirai, Takeshi Goto, Masashi Ohkawa, Seishi Sekine, and Takashi Sato

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Abstract

We have experimentally investigated how sensitivity is dependent on the position of a waveguide passing over a diaphragm in a silicon-based integrated optic pressure sensor based on the elasto-optic effect.

© 2001 IEEE

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