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Design Method of a Guided-wave Optical Pressure Sensor Based on Dependences of Sensitivity and Resonance Frequency on Diaphragm Dimensions

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Abstract

Designing a silicon-based guided-wave optical pressure sensor, consisting of a diaphragm and a waveguide across the diaphragm, was considered based on dependences of sensitivity and resonance frequency on diagram dimensions.

© 2014 Optical Society of America

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