High efficient electric-discharge ArF and KrF excimer lasers with He as a buffer gas

A.M. Razhev; S.N. Bagayev; A.A. Zhupikov

The 4th Pacific Rim Conference on Lasers and Electro-Optics
Technical Digest Series (Optica Publishing Group, 2001),
paper P1_2

High efficient electric-discharge ArF and KrF excimer lasers with He as a buffer gas

A.M. Razhev, S.N. Bagayev, and A.A. Zhupikov

Conference on Lasers and Electro-Optics/Pacific Rim 2001

Chiba Japan
15–19 July 2001
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Poster Session 1 [Room E] (P1)

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A. M. Razhev, S. N. Bagayev, and A. A. Zhupikov, "High efficient electric-discharge ArF and KrF excimer lasers with He as a buffer gas," in The 4th Pacific Rim Conference on Lasers and Electro-Optics, Technical Digest Series (Optica Publishing Group, 2001), paper P1_2.

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Abstract

The modified high-voltage excitation circuit of LC-inverter type providing high specific pump power in a very short time interval has been created. The use of this scheme allowed achieving excellent results of radiation energy and efficiency for ArF and KrF excimer lasers using He as a buffer gas.

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