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  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper ME2_6

Planar Silicon Light Emitting Sources in Standard 1.2 and 2 micron CMOS Technology

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Abstract

Three structures of silicon light emitting sources are described, each presenting higher electrical-to-optical conversion efficiency. The advantage of these structures lay in the fact that they were all fabricated using conventional standard VLSI technology, without any alternation of the processing procedure.

© 2001 IEEE

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