Abstract

The interests in a high repetition rate (HRR) is enhanced due to the many potential applications such as microlithography, stereography, laser cleaning, laser annealing, and so on. We developed an excimer laser, where the laser gas can be circulated at over 150 m/s by 2-stage axial blowers. The laser apparatus is shown in Fig. 1. The chamber, roughly 1.5 (H) × 2.5 (W) × 2 (L) m³ in size, is made of Niclad SUS304 stainless steel. The apparatus has two set of the main electrodes corresponding to the thyratrons and semiconductor switch. The lengths of the discharges for the switch and thyratrons are 1200 and 100 mm respectively, which have the same sizes of 23 (G) × 10 (W) mm². The storage and peaking capacitors for thyratrons 64 nF and 60 nF (totally 69 and 65 including the capacitors for the semiconductor switch).

© 1995 IEEE