Abstract

Various functions of organic materials in electronics and optics have been received much attentions. Therefore, production of various organic films is of growing interest. Inorganic films such as high-temperature ceramic superconducting materials or ferroelectric ceramics are successful examples of laser ablation deposition schemes. Recently, organic polymer thin films, which have much lower melting temperatures compared with ceramic materials, have also been successfully deposited via the laser ablation process.^1–3 In these thin organic polymer film deposition, the chemical structure of the organic target materials can be transferred onto a substrate with high accuracy. It can be speculated that the laser pulse substantially depolymerize the target followed by repolymerization on the substrate. The significance of the laser ablation deposition technique is its controllability from shot-to-shot. Therefore, laser ablation processes are suitable for fabricating new material structures of different types of materials with nanometer-size resolution, such as complex systems consisting of organic and inorganic components.

© 1995 IEEE