Abstract

A YAG channel waveguide laser is one of the most promising candidates for use in an integrated solid-state laser. Important requirements for YAG channel waveguide lasers include good control of both refractive indices and core formation in order to achieve single mode operation. Ferrand et al. demonstrated the advantage of using liquid phase epitaxy (LPE) to control the refractive index in order to fabricate planar waveguides.¹ Field et al. successfully prepared a Nd: YAG channel waveguide laser by employing the ion implantation method,² however extremely expensive apparatus is indispensable to this approach. In a previous study, we fabricated a magneto-optic YIG buried channel waveguide using ion beam etching (IBE) with a tri-layered etching mask.³ Extremely refractory materials could be processed by this method. Here we prepare a Nd:YAG buried channel waveguide using LPE and IBE, and confirm laser operation.

© 1995 IEEE