Abstract

Advanced measurement tools are needed to keep pace with future generations of devices and integrated circuits (IC's) as technology pushes towards 100-nm line-widths and gigahertz operating speeds. A promising new direction is the use of scanning probe microscopes for measuring very high-speed signals. Nonlinear interactions have been exploited to achieve ultrafast time resolution with the atomic force microscope,^1-3 the scanning tunneling microscope,⁴ and the scanning near-field optical microscope.⁵

© 1995 IEEE