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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CFK3

Nano-patterning of PMMA using a λ= 46.9 nm table-top laser

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Abstract

The recording in PMMA of nanometer-size features from a Fresnel diffraction pattern utilising a very compact 46.9 nm capillary discharge laser is discussed.

© 2004 Optical Society of America

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