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Conferences > FiO > 2009 > FTuS > FTuS2
  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FTuS2
  • •https://doi.org/10.1364/FIO.2009.FTuS2

Table top schemes for nano-patterning with extreme ultraviolet lasers

L. Urbanski, P. Wachulak, A. Isoyan, F. Jiang, Y. Cheng, J. J. Rocca, C. S. Menoni, M. C. Marconi, and F. Cerrina

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Abstract

We discuss different nanopatterning approaches using table top extreme ultraviolet lasers based on interferometric lithography, Talbot self imaging and holographic projection lithography.

© 2009 Optical Society of America

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