Using CBO crystal as the final mixing nonlinear optical crystal, we generated over 5mJ/pulse at 193nm. The high pulse energy at 193nm is a result of several factors. The efficiency of CBO is about three times better than that of LBO, and an order of magnitude better than BBO. Novel designs in 4th and 5th harmonic generators using readily available BBO crystals allow the efficient and repetitive generation of high pulse energy at the 5th harmonic of 1064nm.

© 2003 Optical Society of America

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