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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1994),
  • paper CThH1

High-brightness 64.4 nm XUV generation by efficient frequency tripling of ArF laser

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Abstract

Although many kinds of extreme-ultraviolet (XUV) and x-ray lasers have been demonstrated up to now, high-brightness coherent source with high repetition rate has not yet ever developed in these spectral region. Higher harmonic generation in the XUV region is also demonstrated in rare gas jets, but the conversion efficiency is poor.

© 1994 Optical Society of America

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