Abstract

Based on nonlinear upconversion techniques, using nanosecond pulsed lasers, a widely tunable narrowband XUV-laser source has been constructed. Its design is schematically depicted in Fig. 1. The laser setup consists of a high-power injection-seeded Nd:YAG laser, delivering pulse energies 550 mJ at 532 nm. or 300 mJ at 355 nm, that pumps a dye laser running either on red-yellow or blue dyes. UV-radiation in the ranges 270-300, 210-270 and 200-210 nm is generated by frequency doubling the dye laser output in KDP or BBO, or by two-stage frequency-doubling and mixing in KDP-BBO.

© 1994 Optical Society of America