Abstract
A high repetition rate (over 1-kHz) excimer laser is useful for several applications such as semiconductor processing and medical applications. Several discharge-pumped kilohertz excimer lasers have been reported.1,2 However, operations of these lasers are mostly in burst-mode. We demonstrate stable continuous operation of a discharge- pumped XeCl excimer laser at a high pulse repetition rate of 2 kHz. Dependency of high repetition rate operations on the gas mixture and input energy density are examined.
© 1989 Optical Society of America
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