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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper FF4

Laser direct writing of integrated optical components

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Abstract

The laser controlled etching of compound semiconductors in solutions was utilized to fabricate integrated optic devices. A brief description of the physics of laser controlled etching is given to facilitate understanding of realizable structures. In particular, etching through a multilayered sample with material discontinuities, namely, different carrier type or bandgap, has revealed interesting physics of the underlaying dissolution mechanism that was not apparent with bulk samples. The sensitivity of laser controlled etching to the optical and electrical properties of semiconductors was utilized during the etching of GaAs/AIGaAs multilayers to produce novel microstructure.

© 1989 Optical Society of America

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