For a high-precision laser photomask repairing system, we have developed a high-energy, subnanosecond compact laser, consisting of a diode-pumped Q-switched Nd:YVO4 laser with 700 ps, TEM00, 0.76 mJ/pulse (1.1 MW) at 1064 nm. Using a MOPA system by a Xe-flashlamp-pumped Nd:YAG amplifier, we have obtained an output laser pulse of 700 ps, 12 inJ/pulse.

© 1996 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription