Abstract

For a high-precision laser photomask repairing system, we have developed a high-energy, subnanosecond compact laser, consisting of a diode-pumped Q-switched Nd:YVO4 laser with 700 ps, TEM00, 0.76 mJ/pulse (1.1 MW) at 1064 nm. Using a MOPA system by a Xe-flashlamp-pumped Nd:YAG amplifier, we have obtained an output laser pulse of 700 ps, 12 inJ/pulse.

© 1996 Optical Society of America

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