We report that short-period domain inverted gratings with considerable inversion depth can be formed by proton exchange in benzoic rather than pyrophosphoric acid followed by rapid thermal annealing at temperatures around 520–610°C. This procedure allowed the fabrication and characterization of first-, second-, and third-order domain inverted gratings. Annealing for extremely short time (~6 s) is crucial for achieving small structures (< 4 µm period).

© 1995 Optical Society of America

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