Abstract

Infrared spectroscopy is known to be one of the most powerful methods for material analysis and identification. However, most of the related measurement work is is still done at labs with large FTIR instruments. In industry, one is often interested in monitoring only a few known parameters in multiple locations and therefore incorporating an expensive FTIR instrument to the production line is not the best option. In recent years a new wave of miniaturized infrared instruments, based on MEMS and semiconductor technologies, has emerged to offer a solution to the problem. These devices aim to utilize the power of spectroscopy to produce stable and specific measurements, while being affordable and small to be installed in production equipment. We present the current status of these MEMS-based sensors, while more specifically present Spectral Engines’ new MEMS-based Spectral Sensor platform. We will tell about results from environmental testing point of view and give application example results.

© 2015 Optical Society of America