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Fluorinated photopolymer thermo-optic switch arrays with dielectric-loaded surface plasmon polariton waveguide structure

Y. Zheng, C. M. Chen, Y. L. Gu, D. M. Zhang, Z. Z. Cai, Z. S. Shi, X. B. Wang, Y. J. Yi, X. Q. Sun, F. Wang, and Z. C. Cui

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Abstract

Novel polymer thermo-optic switch arrays were successfully designed and fabricated based on dielectric-loaded surface plasmon polariton waveguide (DLSPPW) structure. Highly fluorinated low-loss photopolymers and organic–inorganic grafting materials were used as the waveguide core and cladding, respectively. The low absorption loss characteristics and excellent thermal stabilities of the core and cladding materials were obtained. The proposed DLSPPW model was included of fluorinated polymer ridge with 4 × 4 μm2 size loaded on 60-nm thin gold stripe electrode heaters, organic-inorganic grafting material cladding and PMMA substrate. The operation of the device at signal wavelengths is controlled via the thermo-optic effect by electrically heating the gold stripes of dielectric-loaded surface plasmon polariton waveguides. The optimized structural properties of dielectric-loaded surface plasmon polariton waveguides were provided. The propagation loss of a 4-μm wide straight DLSPPW was measured as 0.55 dB∕cm at 1550 nm wavelength. The insertion loss of the device was measured to be about 4.5 dB. The switching rise and fall time of the device applied by 200 Hz square-wave voltage were obtained as 287.5 μs and 370.2 μs, respectively. The switching power was about 5.6 mW, and the extinction ratio was about 13.5 dB. The flexible low-loss multi-functional waveguide switch arrays are suitable for realizing large-scale optoelectronic integrated circuits.

© 2015 Optical Society of America

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Figures (10)
Fig. 1
Fig. 1 Molecular structure of FSU-8 and organic-inorganic grafting PMMA (a) FSU-8 and (b) organic-inorganic grafting PMMA.

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Fig. 2
Fig. 2 UV–vis–NIR absorption spectrums of FPER with Different FSU-8 compositions compared to commercial SU-8 photoresist.

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Fig. 3
Fig. 3 Analysis and simulation of the DLSPP waveguide properties (a) schematic representation of the DLSPPW cross section; (b) fundamental TM00 mode and (c) first higher-order TM01 mode distribution of DLSPPW of optimal configuration, the TM00 mode effective index neff = 1.516; (d) thermal field distribution of electrode.

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Fig. 4
Fig. 4 (a) The schematic configuration of both waveguide and electrode heater masks and (b) the structural diagram of the DLSPPW switch arrays.

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Fig. 5
Fig. 5 Fabrication process for the MZI TO DLSPP waveguide switch arrays.

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Fig. 6
Fig. 6 (a) SEM image of dielectric waveguide section fabricated with FSU-8/FPER: (b) AFM image of the gold stripe surface.

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Fig. 7
Fig. 7 The waveguide propagation loss measured by the cut-back measurement.

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Fig. 8
Fig. 8 (a) Actual photographs of the proposed polymer all-polymer TO DLSPPW switch arrays measured. (b) Near-field guide-mode patterns of the device with signal light at 1550 nm wavelength.

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Fig. 9
Fig. 9 The curves of minute current versus time measured by galvanometer at different wavelength.

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Fig. 10
Fig. 10 Performances of the device: (a) DLSPPW TO switch responses obtained by applying a square-wave voltage at frequency of 200 Hz, (b) actual channel output versus power consumption of the DLSPPW TO switch at 1550 nm for TM mode.

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Tables (2)

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Table 1 Thermal Properties of Fluorinated Photopolymer with Different Content of FSU-8

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Table 2 Comparison with other published results for different material dielectric-loaded DLSSW TO switch.

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Equations (4)

Equations on this page are rendered with MathJax. Learn more.

Δ ϕ = π = 2 π λ Δ n L
Δ ϕ = π = 2 π λ ∂ n ∂ T Δ T L ⇒ L = λ 2 Δ T ( ∂ n ∂ T ) − 1
Au + 2KI + 3I 2 → 2K ( AuI 4 )
L o s s ( i n s e r t i o n ) = L o s s ( c o u p l i n g ) + α × L
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