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Abstract
Auto-focusing technology in ultrafast laser processing, especially for non-planar structures, holds paramount importance. The existing methodologies predominantly rely on optical mechanisms, thereby being limited by the original system and material reflectivity. This work proposes an approach that utilizes laser-induced sound as a feedback signal for system control, thereby circumventing the need for optical system adjustments and facilitating almost real-time tracking. We established an ultrafast laser processing system augmented by acoustic emission technology, allowing for focus tracking on inclined planes. This system also exhibits the capability to generate diverse microscopic morphologies, including grooves and differently oriented laser-induced periodic surface structures (LIPSS), through the manipulation of the acoustic signal threshold. This method can be easily integrated into existing laser processing systems, offering new capabilities for curved surface processing, microstructure manufacturing, and transparent material processing.
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